G3280-60704
KF25 Blank Plug
KF25 Blank Plug
Vacuum chamber cover(inc. o-ring/screws)
NH3 Mass Flow Controller
Harness Cbl:XYZ Bd/RF Gen/Int Bd-Main Bd
Cable: Octopole Driver Board Connection
Cable: Plasma RF 48V Line
Cover Switch Interlock
Capacitor: Analog HV line
Cap As:Gate line(EM gate1/2, Pulse gate)
Capacitor: Pulse HV line
Cable for Pirani Gauge
Cable: QP HV 3
Cable: QP HV 4
QP RF Ctrl Cable Assy
QP RF Cable Assy (QP RF – QP Tank)
QP DC Cable Assy
EM Detector Board (PCA)
Log Amp (PCA)
HV-B PCA
Main PCA
EM Gate2
Ar Gas Pipe Set
He ORS Pipe Set
He/H2 ORS Pipe Set